GORE® High Flex Flat Cables for Semiconductor & Industrial Automation
Our cables offer cleanliness, durability and reliability in harsh semiconductor and industrial automation environments requiring high-speed, continuous high-flex life performance.
Improve Cleanliness, Durability & Reliability in Complex Environments
GORE® High Flex Flat Cables deliver high speeds and acceleration, improved signal integrity, smooth motion and high cleanliness in semiconductor and industrial automation applications. Our lightweight flat cable solutions reduce particle formation, abrasion, outgassing and contamination for higher throughput and yield and less maintenance and total cost.
Our portfolio of GORE High Flex Flat Cables provides manufacturers with many features and benefits that ensure their reliability in semiconductor and industrial automation applications, like:
- proven high flex life performance over multi-million cycles
- low-friction, non-particulating, low-outgassing materials
- resist extreme temperatures, vibration and harsh chemicals
- higher data rate transmission speeds with reliable signal integrity
- flat, self-supporting designs eliminate cable chains, dividers and shelves
- easier installation with a more flexible, tighter bend radius
- lighter materials reduce the cable system’s total weight
- meet industry demand for higher throughput, yields and productivity
- less maintenance, machine downtime and total cost of ownership
For semiconductor production equipment operating in electrostatic discharge (ESD) environments, our anti-static cables offer additional features and benefits, like:
- non-carbon-based, dissipative jacket material prevents electrostatic buildup
- no particle attraction or triboelectric noise interference
- significantly reduce ESD-related failures and product damage
- stand-alone cable system with no grounding system or extra equipment
- eliminate ionizers that are costly to calibrate and maintain
- easy retrofit with Gore’s standard high flex flat cable version
Semiconductor Production Equipment
Lithography
Industrial Manufacturing
With proven cleanliness and durability, our portfolio of GORE High Flex Flat Cables delivers reliable performance in many applications.
| Application | Standard Cables | Anti-Static Cables | Cables & Assemblies | IDC Ribbon Cables |
|---|---|---|---|---|
| Platform | Semiconductor Production Equipment | Lithography | Industrial Automation | |
| Advanced Packaging Equipment | ✓ | ✓ |
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| Back-End Manufacturing & Inspection Processes |
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| ✓ |
| Cleanroom & Vacuum Automation & Robotics |
|
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| ✓ |
| CMOS image sensor (CIS) packaging equipment | ✓ |
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| CMP Equipment | ✓ |
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|
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| Electronic Component Packaging Equipment |
| ✓ |
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| ESD-Sensitive Manufacturing Equipment |
| ✓ |
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| eSCan Multiple E-Beam Systems |
|
| ✓ |
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| Front-End Wafer Inspection | ✓ |
|
| ✓ |
| Flat Panel Display (FPD) Manufacturing Equipment | ✓ |
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| Linear Motion Stages | ✓ |
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| ✓ |
| Lens Manufacturing Equipment | ✓ | ✓ |
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| Mask Inspection Systems |
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| ✓ |
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| Optical Metrology Systems |
|
| ✓ |
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| Pick & Place Equipment | ✓ | ✓ |
| ✓ |
| Reticle Handler, Mask & Stage |
|
| ✓ |
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| Semiconductor Automated Optical Inspection (AOI) | ✓ |
|
| ✓ |
| Wafer Handling | ✓ |
| ✓ |
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| Wafer Metrology Equipment | ✓ |
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| Wafer Stage |
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| ✓ |
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GORE High Flex Flat Cables for Semiconductor Production Equipment
Our self-supporting, lightweight cables can be reliably used in any energy chain or cable track. They improve signal integrity, achieve low particulation and outgassing, have a flex life of over 20 million cycles, reduce weight and stress, and help prevent triboelectric charge and voltage buildup.
- Standard version (cleanroom & vacuum environments)
- Anti-static version (ESD-sensitive environments)
GORE High Flex Cables and Assemblies for Lithography
Our durable cables are designed for extreme ultraviolet (EUV), deep ultraviolet (DUV) and next-gen high numerical aperture (High-NA EUV) lithography systems. They offer higher data rate speeds and acceleration, low outgassing and particulation properties, and a high flex life beyond 20 million cycles. These cables are also RGA (Residual Gas Analysis) tested to ensure high cleanliness.
GORE High Flex IDC Ribbon Cables for Industrial Automation
In high-speed automated and other high-stress devices, our IDC (insulation displace connectors) ribbon cables offer continuous flex life performance up to 100,000,000 cycles. These durable, lightweight cables are low outgassing, reduce cable weight and oscillation, and withstand abrasion, vibration and extreme temperatures.
Technical Information
| Elec. / Mech. / Environ. Property | Standard Version | Anti-Static Version |
|---|---|---|
| Maximum Acceleration g (m/sec2) | 4.0 (40) | 4.0 (40) |
| Speed m/sec | 4.0 | 4.0 |
| Surface Resistance Ohms (ASTM-D257) 45%, rH, 23°C | — | </= 2 x 109 |
| Typical Charge Decaya msec (DIN-EN 1149-5; 2008-04) 45% rH, 23°C | — | ≤ 4 |
| Voltage Buildupa V (PLFWI-2730 up to 1000 Cycles) | — | << 100 |
| Operating Relative Humidity rH % | 45 ± 15 | 45 ± 15 |
| Jacket Material | Expanded PTFE Composite | Expanded PTFE Composite with Non-Carbon-Based Dissipative Material Treatmentb |
| Jacket Color | White | White |
| Core Types | Signal, Power, Fiber Optic, Pneumatics | Signal, Power, Fiber Optic, Pneumatics |
| Maximum Self-Supporting Stroke Lengthc mm (in) | 500 (20) | 500 (20) |
| Overall Widthd mm (in) | Up to 300 (12) | Up to 300 (12) |
| Minimum Bend Radiusd mm (in) | 50 (2) | 50 (2) |
| Flex Life Cycles (BR. 50 mm up to 4G Accelerations) | > 20 million | > 20 million |
| Temperature Range °C | -40 to +200 | -40 to +80 |
| Cleanliness Classe (ISO14664-1) | 1 | 1 |
| Particulationf % (ISO14664-1 / VDI Guideline 2083) | < 0.1 | < 0.1 |
| Outgassingg mBar liter/sec cm2 (AMU) H20 CxHyv CxHynv | < 6 x 10-10 < 1 x 10-11 (< 100) < 1 x 10-12 (> 100) | — |
a. Results may vary under different conditions. Test method details available upon request.
b. Details of Gore’s patent available at patents.justia.com/patent/9534159.
c. Baseplate required.
d. Standard configuration only. MBR can vary with specific configurations.
e. Based on Anti-ESD Trackless Cable, GKT-FTFH-01-A, Serial Number 14111802. Qualification report available upon request.
f. Details of the Fraunhofer Institute’s study available at gore.com/particulation.
g. AMU = Atomic Mass Units.
| Elec. / Mech. / Environ. Property | Vacuum | Non-Vacuum |
|---|---|---|
| Maximum Accelerationa,b m/sec2 | > 40 | > 40 |
| Speeda m/sec | > 3 | > 3 |
| Jacket Material | PTFE | Expanded PTFE Composite |
| Jacket Color | White | White |
| Core Types | Signal, Power, Pneumatics, Fluids | Signal, Power, Pneumatics, Fluids |
| Maximum Self-Supporting Stroke Length mm (in) | 500 (20) | 500 (20) |
| Overall Width mm (in) | 130 (5) | 300 (12) |
| Minimum Bend Radiusa | > 10 x 100 | > 10 x 100 |
| Flex Life Cycles (BR. 50 mm up to 4G Accelerations) | > 20 million | > 20 million |
| Temperature Rangea °C | -20 to +260 | -20 to +90 |
| Cleanliness Class (ISO14664-1) | 2 | 4 |
| Certifications | UL | UL |
| Particulationc % (ISO14664-1 / VDI Guideline 2083) | < 0.1 | < 0.1 |
| Outgassingd mBar liter/sec cm2 H20 (AMUd 18) CxHyv (volatile CxHy) (AMUd 45-100) CxHynv (non-volatile CxHy) (AMUd 101-200) | 4.00E-09 1.00E-10 6.00E-12 | — |
a. Dependent on specific application requirements.
b. For applications requiring higher acceleration and speed, contact a Gore representative.
c. Details of the Fraunhofer Institute’s study available at gore.com/particulation. Particle-free is applicable.
d. AMU = Atomic Mass Units.
| Elec. / Mech. / Environ. Property | 26 AWG | 28 AWG |
|---|---|---|
| Impedance Ohms | 110 | 128 |
| Operating Voltage RMS | 300 | 300 |
| Velocity of Propagation % of Air | 85 | 88 |
| Time Delay ns/ft. | 1.21 | 1.17 |
| Capacitance pF/ft. | 9.7 | 8.1 |
| Dielectric Constant | 1.40 | 1.30 |
| Insulation Material | Composite PTFE | Composite PTFE |
| Insulation Colora | Gray/Gray | Gray/Gray |
| Core Types | Ground, Signal, Ground | Ground, Signal, Ground |
| Conductor | Nickel-Plated, Silver-Plated, Unplated | Nickel-Plated, Silver-Plated, Unplated |
| Minimum Flex Life Cycles | 50,000,000 | 100,000,000 |
| Temperature Range °C Nickel-Plated Conductors Silver-Plated Conductors Unplated Conductors | -65 to +260 -65 to +200 -55 to +150 | -65 to +260 -65 to +200 -55 to +150 |
| Certifications | UL | UL |
a. Other colors available upon request.
b. AMU = Atomic Mass Units.
The Fraunhofer Institute in Germany determined that GORE High Flex Flat Cables have a < 0.1% probability of emitting particulates. They maintain the lowest particulation levels for repeated flexing in cleanroom environments.
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FOR INDUSTRIAL USE ONLY
Not for use in food, drug, cosmetic or medical device manufacturing, processing, or packaging operations.
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