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Enabling Precision in Lithography

Gore collaborates with leading semiconductor manufactures to develop custom reliable cables for lithography systems operating in ultra-clean and ultra-high vacuum environments. Our in-depth knowledge, materials expertise, cleaning processes and rigorous quality testing bring innovative cable assemblies for lithography applications that help our customers keep pace with the industry’s constantly evolving demands. 

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High flex flat cables for semicon production equipment

Advancing Performance in High-Vacuum Environments

EUV (extreme ultraviolet) and DUV (deep ultraviolet) lithography processes demand exceptional precision, cleanliness, and reliability especially with next-gen technology like High Numerical Aperture (High NA EUV) lithography systems. Gore supports these technologies with high-performance static and high-flex cables engineered for high-vacuum environments. Qualified for Cleanliness Grades 1, 2, and 4, our cables deliver low outgassing, tight bendability, and durable signal integrity—helping improve throughput, reduce maintenance, and meet the industry's evolving performance standards.

Product Solutions

Lithography Solutions

Our cables and cable assemblies are designed and tested to minimize particulation and contamination while maximizing performance and flexibility, helping customers achieve lower total cost of ownership and greater long-term value.

Discover More Specialized Cables for Semiconductor Equipment

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Ultra-Clean, Reliable Lithography Solutions

Accept no compromise when it comes to your most exciting visions. Rely on Gore’s in-depth expertise and experience for your leading-edge projects.
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Discover Gore Cables in Semiconductor, Lithography, Metrology & Inspection Equipment

Our solutions play a pivotal role in these critical processes by offering proven cleanliness, durability and reliability that enables fabs to boost speeds and throughput without compromising yield.

Featured Content

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Cable Particulation Study for Cleanroom Environments

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Gore Technologies Offer Improvements throughout Semiconductor Manufacturing Processes

Watch the video to see where Gore technologies are used in wafer manufacturing and processing, and assembly and test.

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