GORE® Ultraclean Static Round Cables and Assemblies for Lithography
Our Cleanliness Grade 1 solution is developed and validated to meet the semiconductor industry’s rigorous EUV requirements for purity, reliability and signal integrity.
Unmatched Cleanliness, Durability and Performance
GORE® Ultraclean Static Round Cables and Assemblies offer greater precision and cleanliness for more extreme miniaturization and greater reliability for higher yield, quality and speed. They achieve higher data rates with better signal integrity over longer distances, along with precise, reliable terminations in high-purity lithography processing and high-vacuum applications.
Custom-Engineered for High-Vacuum Environments
Designed for static applications, GORE Ultraclean Static Round Cables and Assemblies meet the most extreme requirements for high vacuum environments, offering features that include:
- low-particulation, low-contamination, low-outgassing materials
- chemically inert and temperature-resistant materials
- very flexible round cable construction
Our finished cables and assemblies provide equipment manufacturers with a host of benefits unmatched by other lithography cables, like:
- meet EUV Cleanliness Grade 1 specifications for high purity
- greater precision and cleanliness to support more extreme miniaturization
- deliver higher data rates with better signal integrity over longer distances
- tight, flexible bend radius for easy installation and precise, reliable terminations
- greater reliability to support demands for higher yield and productivity
- less maintenance, downtime and total cost and more EUV machine uptime
Gore employs rigorous cleaning processes throughout every step, from manufacturing through final testing, to ensure our products meet customer specifications in all key performance areas.
Meeting the Growing Demands of Fabs Using EUV Lithography Processes
Advanced EUV (extreme ultraviolet) lithography systems conduct multiple sophisticated handling, exposure and imaging functions, all within a high-vacuum environment that provides the high purity in semiconductors that today’s standards require.
At the heart of these systems is where you’ll find GORE Ultraclean Static Round Cables and Assemblies for Projection Optics Box (POB) and Illuminator, where optical assembly takes place.
Light is transmitted from reticle to wafer using a complex series of mirrors that reduce the reticle mask pattern to the size of the chip.
Gore Technologies Offer Improvements Throughout Semiconductor Manufacturing Processes
See where our broad capabilities and solutions are used in many critical processes — from lithography, wafer cleaning, and metrology & inspection to advanced packaging, SoC testing and more.
Technical Information
These values demonstrate the mechanical and environmental performance of GORE Ultraclean Static Round Cables for lithography.
| Mech./Environ. Property | Value |
|---|---|
| Jacket Material | PTFE & Fluoropolymer |
| Jacket Color | White & Opaque |
| Core Types | Signal & Power |
| Minimum Bend Radius | > 10 x OD |
| Temperature Rangea °C | -20 to +260 |
| Cleanliness Class (ISO14664-1) | 1 |
| Outgassing mBar liter/sec cm2 | |
H20 (AMUb 18) | 6.00E-10 |
CxHyv (volatile CxHy) (AMUb 45-100) | 2.00E-12 |
CxHynv (non-volatile CxHy) (AMUb 101-200) | 5.00E-13 |
| Hydrogen-Induced Outgassing (HIO) | Applicable |
| Forbidden Materials | Applicable |
| Particle-Free | Applicable |
| Certifications | UL |
a. Dependent on specific application requirements.
b. AMU = Atomic Mass Units.
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FOR INDUSTRIAL USE ONLY
Not for use in food, drug, cosmetic or medical device manufacturing, processing, or packaging operations.
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