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Consistent High Performance and Cleanliness in Semiconductor Filtration

With the highest retention and unparalleled flow, GORE® Microfiltration Media enables the manufacture of expanded polytetrafluoroethylene (ePTFE) membrane filters to improve productivity and increase processing yields.

Our membranes assure repeatable high performance, consistent quality and exceptional high cleanliness in critical filtration applications.

Features & Benefits
Applications
Product Types
Why Gore
Optimal Performance in Challenging Environments

Unmatched by other filtration material suppliers, GORE Microfiltration Media offers unique features that allow them to stand up to challenging environmental conditions and demanding operations, including:

  • clean, non-shedding membranes
  • high chemical and thermal resistance
  • hydrophobic and hydrophilic membranes
  • unique ePTFE microstructure with uniform membrane properties
  • available in various pore size ratings from 0.015 μm to 10 μm
  • membrane consistency from roll to roll and lot to lot
Microfiltration Process Reliability

For filter makers, our best-in-class membranes provide many benefits that ensure their reliability in semiconductor and microelectronics processing, like:

  • proven higher liquid flow rate at a given retention level
  • consistent high quality and repeatable high performance
  • reliably filter nanometer-level particles and harmful contaminants
  • reduce wafer defects and enhance process yields
  • decades of proven successful performance and reliability in many applications

For more than 40 years, GORE Microfiltration Media has been successfully proven in many critical industrial liquid filtration products and systems including wet etch and clean (WEC), photolithography and chemical mechanical polishing (CMP).

  • Semiconductor Manufacturing Processes: Gore’s membranes successfully filter nano-sized particles and harmful contaminants during logic and memory chip fabrication. Filters made with our membranes are applied in wafer cleaning tools to reduce wafer defects. With the industry’s best-available balance of retention and liquid flow rate, they enable high process yields without sacrificing throughput.
  • Microelectronics Fabrication: Gore’s membranes enable higher yields and low cost of ownership in LED/OLED flat panel displays (FPD) and other microelectronics. Manufacturers can also count on our membranes to provide consistent high performance and high quality for producing sensors and other microelectronics assembly devices and products.
  • High Purity Chemical Production: Gore’s chemically inert ePTFE membranes are used in semiconductor-grade chemical production to ensure improved particle reduction and exceptional high purity in chemical manufacturing.

Through R&D and extensive field testing, we’ve developed a portfolio of GORE Microfiltration Media designed to fit many critical applications and microfiltration device design formats. 

Available as rolls in a wide microfiltration pore size range, our membranes facilitate the rapid development of high-performance filters with high particle efficacy and high flow rates. We also offer membrane discs in custom sizes for diverse applications.

ConstructionPore Reference Size (μm)Capabilities / Intended Use
Hydrophobic
Membrane0.015 to 10Aggressive chemical and solvent-based applications
Laminate PP Net0.1 to 1.0Laminate for added support and strength
Hydrophilic
Membrane0.1 to 10Water-based processes
40+ Years Expertise in Microfiltration Process & Technology

Our expertise in manufacturing ePTFE and controlling its microstructure allows us to tailor membranes to increase retention and enable greater throughput or impart specific characteristics. 

For more than four decades, we’ve delivered air, gas, liquid and particle filtration solutions to help our partners purify processes, increase yields and control costs. And as chip design gets finer, we continue to develop new membranes so filter manufacturers can keep up with industry needs.

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Global Manufacturing & Supply Chain

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Product & Application Leadership

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Fast Development

Gore Technologies Offer Improvements throughout Semiconductor Manufacturing Processes
Improvements throughout Semiconductor Manufacturing Processes​

With decades of unique materials science technology and in-depth application knowledge, Gore offers proven solutions that ensure cleanliness, durability and reliability.

Technical Information

Hydrophobic (ePTFE)

SM0-00002
SM0-00003 
SM0-00005 
SM0-00010
SM0-00020
SM0-00050
SM0-00100 
SM0-00500 
SM0-00A00 

Hydrophilic (ePTFE)

HSM0-00010
HSM0-00020 
HSM0-00050 
HSM0-00100
HSM0-00500 
HSM0-00A00 

Laminate (Phobic/PP Net)

SM5-00010 
SM5-00020 
SM5-00050 
SM5-00100

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FOR INDUSTRIAL USE ONLY 

Not for use in food, drug, cosmetic or medical device manufacturing, processing, or packaging operations.

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+1 800 654 4229