In semiconductor and microelectronics cleaning processes, the industry is shifting away from using harsh chemicals to ozone water treatment that’s friendlier to the environment. This treatment eliminates expensive waste treatment, allows operation at room temperature and costs less.

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Ozonation Modules

For decades, Gore’s ozonation modules have enabled a safer, environmentally friendly, cost-effective cleaning process for surface treatment and removing organic contamination from silicon wafers, logic and memory fabrication, flat panel displays (FPD), and photomasks.

We go beyond the current industry benchmark by offering ozone-dissolving modules that generate the cleanest, bubble-free ozone water with continuous, consistent high concentration and flow. Gore’s ozonation modules are a proven reliable solution for improved semiconductor and microelectronics and FPD fabrication cleaning processes.