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Semiconductor & Microelectronics
Gore’s custom-configured static and high-flex cables & cable assemblies are designed, engineered and manufactured to meet the lithography industry’s toughest standards for durability, outgassing performance, cleanliness and flexibility. Whether integrated into DUV, EUV or High-NA EUV process technologies, Gore cable solutions can help fabs increase speeds and output without sacrificing purity or precision.
All Resources For GORE® Ultraclean Static Round Cables & Assemblies: Cleanliness Grade 1
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The Lithography Industry: Development and Challenges
The growing demand for semiconductors — driven by 5G, the Cloud and AI — will only intensify as ever-more devices and technologies are integrated into homes, workplaces and transportation systems. To meet this accelerating demand, fabs using EUV and DUV lithography must increase their speeds and output — without sacrificing purity or precision in the process.
The properties and performance characteristics of GORE® Ultraclean Static Round Cables & Assemblies align with the industry's dual goals: greater precision and cleanliness to support more extreme miniaturization, and greater reliability to support demands for higher yield, quality and speed.
GORE® Ultraclean Static Round Cables & Assemblies: Unmatched Cleanliness
Designed for static applications, our Cleanliness Grade 1 cables and assemblies meet the most extreme requirements for high-vacuum environments. Gore’s IP-protected cleaning processes enable us to produce high-purity cables and assemblies that are approved for use in the innermost parts of the most advanced EUV systems. Along with unmatched cleanliness, these custom-engineered static round cables provide unmatched performance, because our materials expertise enables us to:
- Achieve higher data rates, with greater signal integrity over longer distances, and precise, reliable terminations.
- Incorporate low-contamination, low-outgassing fluoropolymers such as ePTFE (expanded polytetrafluoroethylene) material, and we can further trim outgassing levels to customer requirements.
(acc. to Cleanliness Grade 1)
|Jacket material||PTFE & fluoropolymer|
|Jacket color||white and opaque|
|Core types||signal, power|
|Minimum bend radius||>10 x OD|
|Temperature range [°C]||-20 to +260 a)|
|Outgassing rate [mBar x l/sec x cm2]|
|H20 (AMU 18) b)||6.00E-10|
| CxHyv (volatile CxHy)
(AMU 45-100) b)
| CxHynv (non-volatile CxHy)
(AMU 101-200) b)
|Hydrogen-induced outgassing (HIO)||applicable|
a) depending on application requirements
b) AMU = Atomic Mass Units
At the heart of the most advanced EUV systems, where the demand for purity and precision is greatest, you’ll find GORE® Ultraclean Static Round Cables for Projection Optics Box (POB) and Illuminator.
The Gore Advantage
When it comes to Lithography, you need more than just cable and assembly “products” — you need leading-edge, integrated cable and assembly solutions that are backed by a resourceful, capable and proven partner.
Why Choose Gore and Gore Cable Solutions for Lithography?
Working with Gore, and specifying reliable Gore cables and assemblies for both your static and high-flex applications, can help you achieve more EUV machine uptime, even at higher wafer/hour speeds over multi-million production cycles. We’re not here just to provide ultra-high vacuum cables — we’re ready to help you meet ultra-high expectations as well.
|Built-In Cleanliness and Reliability||A Partner Dedicated to Quality|
|Lowest contamination from CxHy and H20||Years of experience|
|Low friction materials for lowest particulation||Co-engineering and material expertise|
|Reliable signal integrity for high-speed data transmission over longer distances||Unmatched cleanliness throughout the entire process|
|Tight routing for easy installation in tight spaces||Extensive lab testing that ensures the highest quality|
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FOR INDUSTRIAL USE ONLY
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