LCD Manufacturer Reduces Cost, Improves Water Quality and Avoids Major Capital Expenditure
An Asia-based LCD fab was experiencing periodic quality problems with their DI water system, a reverse osmosis system with a DI polishing loop comprising 40 30-inch 0.1µm filters delivering 120 CMH. Particle count specifications were not being met and UF modules were being considered. The substitution of only 15 GORE® 0.1µm filters into the existing system provided protection against upsets and particle count reduction at performance approaching that of UF modules, at a fraction of the cost.
Benefits
- The overall cost to operate the DI water system was reduced due to fewer filters to buy and maintain.
- The major capital expense of installing UF modules was avoided.
- Operations are more stable, yields are improved and down time is eliminated with no water quality upsets to troubleshoot.
Situation
An Asian-based manufacturer of liquid crystal displays was experiencing periodic quality problems with their DI water system. Facility water first passes through a reverse osmosis system and then through a DI polishing loop comprising three 12-round housings with a total of 40 30-inch 0.1μm filter cartridges to deliver 120 CMH. When the RO system was not operating properly, a large number of particles passed into the polish loop. The existing DI system was unable to provide the water quality specification of 10,000 counts per liter at 0.2 μm.
To address the water quality problem, the manufacturer was considering replacing the filter cartridges with UF modules, at a considerable expense to install and operate.
Solution
- In each of the three (3) existing 12-round housings, five (5) GORE® 0.1 μm Filters and seven (7) blanks were installed in place of the existing, low-performing 0.1 μm filters
- Particle counts were measured with production Anatel monitor
Results
- With the GORE® Filters installed, it took only 15 minutes to rinse up housings and put them on-line in production.
- Particle counts were reduced to 1000 counts/liter at 0.1μm and counts/liter at 0.2 μm
- Number of filters reduced from 36 to 15.
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