Semiconductor Manufacturer Reduces Total Cost of Filtration by More Than 50% Using Fewer Filters in an Existing System
A US semiconductor manufacturer was looking for a cost-effective replacement for Nylon pre-filters in their UPW facility. The high flow rate GORE® filters enabled the manufacturer to replace 840 10-inch-equivalents of 0.1µm Nylon filters with only 210 10-equivalents of GORE® 0.1µm filters in the existing housings.
Benefits
- Total cost of filtration was reduced by more than 50%
- Reduced energy consumption due to lower differential pressure
- Improved particle performance reduced challenge to final filter
Situation
At a US semiconductor manufacturer, the polishing loop pre-filters in the UPW facility were causing concern due to a charge loss and reduced performance. The facility team sought the most cost-effectiveway to replace the filters while maintaining water quality specification.
- UPW loop: 2200 GPM separated into 3 loops
- UF final filter with 0.2 μm charged Nylon pre-filters
- Pre-filters: seven (7) 30-round housings with 40-inch filters
Solution
GORE® 0.1 μm filters were selected to replace the 0.2 μm Nylon filters.
- In each of the seven (7) housings, 30 GORE® 0.1 μm 10-inch filters replaced 30 0.2 μm 40-inch Nylon Filters.
- An adjustable hold-down plate enabled the use of the 10-inch GORE® Filters in the existing 40-inch housings.
Results
- Number of 10-inch filter equivalents was reduced from 840 to 210
- Pressure drop was reduced by 10%
FOR MICROELECTRONICS USE ONLY.
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