W.L.Gore & Associates, Inc.
Filtration
Filters for Semiconductor Applications
Better retention combined with superior flow.
As line widths and critical particle size decreases, additional demands are placed on semiconductor process owners. GORE® Filters for Semiconductor Applications can help reduce critical particle counts and increase bath turnovers.
Through a significant advancement in membrane technology, GORE® Filters provide up to 3 times the flow rate of industry standard filters without sacrificing retention. GORE® Filters enable you to:
- Upgrade retention and reduce particle counts
- Achieve higher flow rates and faster bath turnovers
- Lower the cost of ownership
A range of GORE® Filters are available to improve the performance of semiconductor liquid filtration processes.
| Dilute Chemicals | Wet stations, spray tools, post-polish cleans, low-temperature etch baths, dilute chemical recirculation baths |
|---|---|
| Ultrapure Water | Wet stations, final rinse baths, ultrasonic cleans, QDR baths, water recovery lines |
| Chemicals | Wet stations, acids, bases, solvents, wafer re-claim processes, chemical inlet supply lines, chemical distribution |